Publications & Standards
Table of samples available and measurement results achieved (including uncertainties):
|
Available reference material |
Contact |
|
Molecular multi-layer with delta layers for measuring sputtering yield and interface resolution in XPS and SIMS depth profiling |
|
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Mixed molecular layers for assessing quantification in XPS and SIMS depth profiling |
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Nanostructured block-copolymer films with characteristic dimensions between 20 nm and 75 nm for evaluation of scanning probe microscopy methods |
|
Method |
Characteristic measurand |
Contact |
|
Grazing Incidence X-ray Fluorescence |
2.5% (relative uncertainty for quantification) |
|
|
SIMS depth profiling of organics |
5 nm (interface resolution |
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Electrical atomic force microscopy |
30 nm (lateral resolution) |
Publications
- P. Hönicke, B. Detlefs, M. Müller , E. Darlatt, E. Nolot, H. Grampeix, B. Beckhoff, Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis, Physica Status Solidi (A), 2015, 212(3), 523-528
http://dx.doi.org/10.1002/pssa.201400204 - M. Kolbe, P. Hönicke, Fundamental parameters of Zr and Ti for a reliable quantitative X-ray fluorescence analysis, X-ray spectrometry, 2015
http://dx.doi.org/10.1002/xrs.2603 - C. Fleischmann, T. Conard, R. Havelund, A. Franquet, C. Poleunis, E. Voroshazi, A. Delcorte and W. Vandervorst, Fundamental aspects of Arn+ SIMS profiling of common organic semiconductors, Surface and Interface Analysis, 2014, 46 (51) pp 54-57
http://onlinelibrary.wiley.com/doi/10.1002/sia.5621/abstract - A. Franquet, C. Fleischmann, T. Conard, E. Voroshazi, C. Poleunis, R. Havelund, A. Delcorte and W. Vandervorst, G-SIMS analysis of organic solar cell materials, Surface and Interface Analysis, 2014, 46 (S1) pp 96-99
http://onlinelibrary.wiley.com/doi/10.1002/sia.5650/abstract - R. Havelund, M.P. Seah, A.G. Shard, and I.S. Gilmore, Electron flood gun damage effects in 3D secondary ion mass spectrometry imaging of organics, 2014, Journal of the American Society of Mass Spectrometry, 25 (9) pp 1565-1571
http://www.ncbi.nlm.nih.gov/pubmed/24912434 - A.G. Shard, S.J. Spencer, S.A. Smith, R. Havelund, and I.S. Gilmore, The matrix effect in organic secondary ion mass spectrometry, 2014, doi:10.1016/j.ijms.2014.06.027
http://www.sciencedirect.com/science/article/pii/S138738061400253X - M.P. Seah, R. Havelund and I.S. Gilmore, Universal Equation for Argon Cluster Size-Dependence of Secondary Ion Spectra in SIMS of Organic Materials, 2014, Journal of Physical Chemistry C, 118 (24) pp 12862-12872
http://dx.doi.org/10.1021/jp502646s - P. Hermann, A. Hoehl, G. Ulrich, C. Fleischmann, A. Hermelink, B. Kästner, P. Patoka, A. Hornemann, B. Beckhoff, E. Rühl, and G. Ulm , Characterization of semiconductor materials using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy, Optics Express, 2014, 22 (15)
http://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-22-15-17948 - Müller, M., Hönicke, P., Detlefs, B., and Fleischmann, C., Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry, Materials, 2014, 7 (4), pp 3147-3159
http://www.mdpi.com/1996-1944/7/4/3147 - L. Yang, M.P. Seah, I.S. Gilmore, R.J.H. Morris, M.G. Dowsett, L. Boarino, K. Sparnacci and M. Laus, Depth Profiling and Melting of Nanoparticles in Secondary Ion Mass Spectrometry (SIMS), Journal of Physical Chemistry C, 2013, 117 (31) pp 16042-1605
http://pubs.acs.org/doi/abs/10.1021/jp4048538 - Gilmore, I. S., SIMS of organics-Advances in 2D and 3D imaging and future outlook, J. Vac. Sci. Technol. A, 2013, 31, 050819
http://scitation.aip.org/content/avs/journal/jvsta/31/5/10.1116/1.4816935 - Seah, M. P., Universal Equation for Argon Gas Cluster Sputtering Yields, J. Phys. Chem. C, 2013, 117 (24), pp 12622-12632
http://pubs.acs.org/doi/abs/10.1021/jp402684c - Yang, L., Seah, M. P., Gilmore, I. S., Morris R. J. H., Dowsett, M. G., Boarino, L., Sparnacci, K., and Laus, M., Depth Profiling and Melting of Nanoparticles in Secondary Ion Mass Spectrometry, J. Phys. Chem. C, 2013, 117 (31), pp 16042-16052
http://pubs.acs.org/doi/abs/10.1021/jp4048538 - Yang, L., Seah, M. P., and Gilmore, I. S., Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams, J. Phys. Chem. C, 2012, 116 (44), pp 23735-23741
http://pubs.acs.org/doi/abs/10.1021/jp307203f
